Publications

2 results for Y.W. Kim

Development of 111 texture in Al films grown on SiO₂/Si(001) by ultrahigh-vacuum primary-ion deposition
- - Y.W. Kim
  - I. Petrov
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Directed sputter deposition of AlCu: Film microstructure and microchemistry
- - S.M. Rossnagel
  - J. Moser
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films