Publications

2 results for Mumit Khan

Simulation of X-ray mask defect printability
- - B.S. Bollepalli
  - Scott D. Hector
  - et al.
- 1997
- Microlithography 1997
X-ray lithography for ≤100 nm ground rules in complex patterns
- - Scott Hector
  - Victor Pol
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures