Publications

4 results for R.S. Patel

Mask technology for excimer laser projection ablation
- - J.L. Speidell
  - S. Cordes
  - et al.
- 1997
- BACUS Symposium on Photomask Technology and Management 1997
Conference paper
A novel aluminum on quartz mask for excimer laser projection ablation
- - R.S. Patel
  - J.L. Speidell
  - et al.
- 1997
- International Journal of Microcircuits and Electronic Packaging
Paper
Low-cost mask for excimer laser projection ablation
- - James L. Speidell
  - Rajesh S. Patel
  - et al.
- 1996
- BACUS Symposium on Photomask Technology and Management 1996
Conference paper
Masks for laser ablation technology: new requirements and challenges
- - J.L. Speidell
  - Doris Pulaski
  - et al.
- 1995
- BACUS Symposium on Photomask Technology and Management 1995
Conference paper