Electron beam induced damage in N-rich SiNx films deposited by plasma enhanced chemical vapour deposition
- Ch.B. Lioutas
- N. Vouroutzis
- et al.
- 1997
- Thin Solid Films
Publications
3 results for E.C. Paloura
Microstructure modifications induced by bonded hydrogen in N-rich SiNx:H films
- E.C. Paloura
- Ch.B. Lioutas
- et al.
- 1996
- Journal of Applied Physics
On the effect of bonded hydrogen in the local microstructure of PECVD SiNx:H films
- E.C. Paloura
- Y. Kuo
- et al.
- 1995
- Physica B: Physics of Condensed Matter