High-numerical-aperture effects in photoresist
- Donis G. Flagello
- Tom D. Milster
- 1997
- Applied Optics
Paper
Publications
4 results for Tom D. Milster
Theory of high-NA imaging in homogeneous thin films
- Donis G. Flagello
- Tom Milster
- et al.
- 1996
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
PaperExperimental verification of high numerical aperture effects in photoresist
- Donis G. Flagello
- Tom Milster
- 1994
- Microlithography 1994
Conference paperThree-dimensional modeling of high-numerical-aperture imaging in thin films
- D. Flagello
- Tom D. Milster
- 1992
- SPIE OE/LASE 1992
Conference paper