Process and Tool Monitoring Strategy for Advanced Magnetic Tunnel Junction Stack Deposition
- Gabriel Rodriguez
- Oscar Van Der Straten
- et al.
- 2024
- ASMC 2024
Publications
4 results for Gabriel Rodriguez
Method for improving stability of plasma ignition in a multi-cathode magnetron PVD system
- Jessica Gruss-Gifford
- V. Mehta
- et al.
- 2020
- ASMC 2020
Study of TiN and TaN underlayer properties and their influence on W growth
- Shanti Pancharatnam
- Gabriel Rodriguez
- et al.
- 2019
- IEEE Trans Semicond Manuf
Study of titanium nitride underlayer properties and its influence on tungsten growth
- Shanti Pancharatnam
- J. Wynne
- et al.
- 2018
- ASMC 2018