Publications

3 results for Ben Vampatella

Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Lithography 2003
Evaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- - A.C. Chen
  - A. Flamholz
  - et al.
- 1997
- Microlithography 1997