Publications

2 results for Shumay D. Shang

Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Lithography 2003