Publications

3 results for Chester Huang

Ultrathin membrane, masks for electron projection lithography
- - O.R. Wood II
  - W.J. Trybula
  - et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Current Developments of a High Performance CA Resist for Mask Making Application
- - Wu-Song Huang
  - Wei He
  - et al.
- 2003
- Photomask and Next-Generation Lithography Mask Technology 2003
Enhancement of KRS-XE for 50 keV advanced mask making applications
- - Karen Petrillo
  - David Medeiros
  - et al.
- 2002
- SPIE Photomask Technology 2002