Publications

2 results for D. O'Grady

Lithographic evaluation of a DUV carbon attenuated phase shift mask
- - A.C. Callegan
  - K. Babich
  - et al.
- 1998
- Microelectronic Engineering
Impact of attenuated mask topography on lithographic performance
- - Richard A. Ferguson
  - William J. Adair
  - et al.
- 1994
- Microlithography 1994