Publications

2 results for Jenny Q. Gao

MEMS milliactuator for hard-disk-drive tracking servo
- - Toshiki Hirano
  - Long-Sheng Fan
  - et al.
- 1998
- JMEMS
Paper
High aspect ratio etching in polymer for microactuator applications
- - W.Y. Lee
  - J. Gao
  - et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
Conference paper