Electrostatic microactuator and design considerations for HDD applications
- L.-S. Fan
- T. Hirano
- et al.
- 1999
- IEEE Transactions on Magnetics
Paper
Publications
5 results for W.Y. Lee
High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IEEE/ASME TMECH
PaperA MICRO-ACTUATOR FOR A HARD-DISK DRIVE FINE TRACKING SERVO
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IMECE 1998
Conference paperMEMS milliactuator for hard-disk-drive tracking servo
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- JMEMS
PaperHigh aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
Conference paper