Publications

2 results for M. Rajaratnam

Development of APSM resists for sub-200 nm contact holes
- - M. Rajaratnam
  - M. Reilly
  - et al.
- 1999
- Microelectronic Engineering
Correlation of UVIIHS resist chemistry to dissolution rate measurements
- - J. Thackeray
  - T.H. Fedynyshyn
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures