Publications

3 results for A.T. Hurst Jr.

Plasma etching of NiFe/Cu and NiMnSb/Al₂O₃ multilayers for sub-micron pattern definition
- - K.B. Jung
  - J. Hong
  - et al.
- 1999
- Journal of Magnetism and Magnetic Materials
Paper
Relative merits of [formula omitted] and [formula omitted] plasma chemistries for dry etching of magnetic random access memory device elements
- - K.B. Jung
  - H. Cho
  - et al.
- 1999
- Journal of Applied Physics
Conference paper
High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements
- - K.B. Jung
  - J. Hong
  - et al.
- 1999
- Applied Surface Science
Paper