Publications

2 results for P.F. Petric

Projection reduction exposure with variable axis immersion lenses: Next generation lithography
- - H.C. Pfeiffer
  - R.S. Dhaliwal
  - et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PREVAIL: Operation of the electron optics proof-of-concept system
- - M. Gordon
  - J.E. Lieberman
  - et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures