Publications

2 results for Dennis Hayden

MARS: Femtosecond laser mask advanced repair system in manufacturing
- - Richard Haight
  - Dennis Hayden
  - et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Implementation and performance of a femtosecond laser mask repair system in manufacturing
- - R. Haight
  - Dennis Hayden
  - et al.
- 1998
- BACUS Symposium on Photomask Technology and Management 1998