Plasma-induced surface segregation and oxidation in nickel-iron thin films
- R. Hsiao
- D. Mauri
- 2000
- Applied Surface Science
Paper
Publications
6 results for R. Hsiao
Processing and modeling options for advanced thin film magnetoresistive head structures
- R.E. Fontana Jr.
- M.L. Williams
- et al.
- 1999
- INTERMAG 1999
Conference paperTitanium carbide etching in high density plasma
- R. Hsiao
- D.C. Miller
- et al.
- 1999
- Applied Surface Science
PaperSi/SiO2 etching in high density SF6/CHF3/O2 plasma
- R. Hsiao
- J. Carr
- 1998
- Materials Science and Engineering B
PaperAnisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
PaperEtching of tantalum in fluorine-containing high density plasmas
- R. Hsiao
- D.C. Miller
- 1996
- JES
Paper