Publications

2 results for Wen-Ii Wu

Confinement effects on the spatial extent of the reaction front in ultrathin chemically amplified photoresists
- - Darío L. Goldfarb
  - Marie Angelopoulos
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thin film confinement effects on the thermal properties of model photoresist polymers
- - Christopher L. Soles
  - Eric K. Lin
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures