Publications

3 results for Michael Armacost

When is bilayer thin-film imaging suitable: Comparison with single layer resists
- - Scott Halle
  - Alan Thomas
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
A high reliability Metal Insulator Metal capacitor for 0.18 μm Copper technology
- - M. Armacost
  - A. Augustin
  - et al.
- 2000
- IEDM 2000
Plasma-etching processes for ULSI semiconductor circuits
- - M. Armacost
  - P.D. Hoh
  - et al.
- 1999
- IBM J. Res. Dev