Publications

2 results for Jodi M. Szarko

Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
- - Bogdan Dragnea
  - Jan Preusser
  - et al.
- 2001
- Applied Surface Science
Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
- - Bogdan Dragnea
  - Jan Preusser
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures