Publications

3 results for K.R. Pope

Novel Si-based composite thin films for 193/157 nm attenuated phase shift mask(APSM) applications
- - S. Jay Chey
  - C.R. Guarnieri
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Post-chemical-mechanical planarization cleaning application in metallization
- - C. Huynh
  - J. Chapple-Sokoi
  - et al.
- 2000
- ASMC 2000
Studies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- - S.L. Cohen
  - D.L. Rath
  - et al.
- 1995
- MRS Spring Meeting 1995