Ion projection direct-structuring for nanotechnology applications
- Hans Loeschner
- Ernest J. Fantner
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
2 results for L. Merhari
Nanocomposite resist systems for next generation lithography
- L. Merhari
- K.E. Gonsalves
- et al.
- 2002
- Microelectronic Engineering
Paper