Publications

2 results for Helmut Tews

Time-dependent dielectric breakdown evaluation of deep trench capacitor with sidewall hemispherical, polysilicon grains for gigabit DRAM technology
- - Fen Chen
  - Porshia Parkinson
  - et al.
- 2002
- IIRW 2002
Conference paper
Nitrogen-induced transient enhanced diffusion of dopants
- - Cheruvu Murthy
  - Kilho Lee
  - et al.
- 2002
- Applied Physics Letters
Paper