Publications

2 results for George L. Mack

Linewidth variation characterization by spatial decomposition
- - Alfred K. Wong
  - Antoinette F. Molless
  - et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
Characterization of line width variation
- - Alfred K. Wong
  - Antoinette F. Molless
  - et al.
- 2000
- SPIE Advanced Lithography 2000