Publications

3 results for Eric Coker

Linewidth variation characterization by spatial decomposition
- - Alfred K. Wong
  - Antoinette F. Molless
  - et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
When is bilayer thin-film imaging suitable: Comparison with single layer resists
- - Scott Halle
  - Alan Thomas
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Characterization of line width variation
- - Alfred K. Wong
  - Antoinette F. Molless
  - et al.
- 2000
- SPIE Advanced Lithography 2000