Publications

5 results for A. Gungor

Texture of Cu and dilute binary Cu-alloy films: Impact of annealing and solute content
- - K. Barmak
  - A. Gungor
  - et al.
- 2003
- Materials Science in Semiconductor Processing
Paper
Annealing behavior of Cu and dilute Cu-alloy films: Precipitation, grain growth, and resistivity
- - K. Barmak
  - A. Gungor
  - et al.
- 2003
- Journal of Applied Physics
Paper
Texture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) allow thin films
- - A. Gungor
  - K. Barmak
  - et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- - A. Gungor
  - K. Barmak
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
Texture and resistivity of Cu and dilute Cu alloy films
- - K. Barmak
  - A. Gungor
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper