Large-field particle beam optics for projection and proximity printing and for maskless lithography
- Hans Loeschner
- Gerhard Stengl
- et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Paper
Publications
4 results for Reinhard Springer
Ion projection printing for patterning of magnetic media
- Andreas Dietzel
- Ruediger Berger
- et al.
- 2002
- INTERMAG 2002
Conference paperIon projection printing for patterning of magnetic media
- A. Dietzel
- R. Berger
- et al.
- 2002
- INTERMAG 2002
Conference paperIon projection direct structuring for patterning of magnetic media
- Andreas Dietzel
- Rüdiger Berger
- et al.
- 2002
- IEEE Transactions on Magnetics
Paper