Large-field particle beam optics for projection and proximity printing and for maskless lithography
- Hans Loeschner
- Gerhard Stengl
- et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Publications
7 results for Wilhelm H. Bruenger
Ion projection printing for patterning of magnetic media
- Andreas Dietzel
- Ruediger Berger
- et al.
- 2002
- INTERMAG 2002
Ion projection printing for patterning of magnetic media
- A. Dietzel
- R. Berger
- et al.
- 2002
- INTERMAG 2002
Nanocomposite resist systems for next generation lithography
- L. Merhari
- K.E. Gonsalves
- et al.
- 2002
- Microelectronic Engineering
Ion projection direct structuring for patterning of magnetic media
- Andreas Dietzel
- Rüdiger Berger
- et al.
- 2002
- IEEE Transactions on Magnetics
Ion projection lithography for resistless patterning of thin magnetic films
- W. Bruenger
- M. Torkler
- et al.
- 2000
- Microelectronic Engineering
Electron beam testing and its application to packaging modules for very large scale integrated (vlsi) chip arrays
- F.J. Hohn
- T.H.P. Chang
- et al.
- 1989
- Proceedings of SPIE 1989