Publications

3 results for Jan Preusser

Water vapor uptake in photolithographic polymers observed by infrared near-field scanning optical microscopy in a controlled environment
- - Laurie A. McDonough
  - Bogdan Dragnea
  - et al.
- 2003
- Journal of Physical Chemistry B
Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
- - Bogdan Dragnea
  - Jan Preusser
  - et al.
- 2001
- Applied Surface Science
Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
- - Bogdan Dragnea
  - Jan Preusser
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures