Chemical vapor deposition of ZnS:Mn for thin-film electroluminescent display applicationsAnna W. TopolKathleen A. Dunnet al.2004Journal of Materials ResearchPaper
Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applicationsSpyridon SkordasFilippos Papadatoset al.2002MRS Proceedings 2002Conference paper