Synthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV PhotoresistsPeter I. TattersallDavid Breslinet al.2004Chemistry of Materials
Mechanism of phenolic polymer dissolution: importance of acid-base equilibriaLewis W. FlanaginChristopher L. McAdamset al.1999Macromolecules
Probabilistic model for the mechanism of phenolic polymer dissolutionLewis W. FlanaginChristopher L. McAdamset al.1998Microlithography 1998