Publications

2 results for Andy Romano

Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography
- - Alex K. Raub
  - A. Frauenglass
  - et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paper
Deep-UV immersion interferometric lithography
- - Alex K. Raub
  - A. Frauenglass
  - et al.
- 2004
- SPIE Advanced Lithography 2004
Conference paper