Chemical mapping of polymer photoresists by scanning transmission x-ray microscopy
- Ligia Muntean
- Romain Planques
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
5 results for Stephen R. Leone
Fourier transform infrared spectroscopy studies of water-polymer interactions in chemically amplified photoresists
- Laurie A. McDonough
- Viktor Chikan
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Water vapor uptake in photolithographic polymers observed by infrared near-field scanning optical microscopy in a controlled environment
- Laurie A. McDonough
- Bogdan Dragnea
- et al.
- 2003
- Journal of Physical Chemistry B
Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
- Bogdan Dragnea
- Jan Preusser
- et al.
- 2001
- Applied Surface Science
Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
- Bogdan Dragnea
- Jan Preusser
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures