Publications

2 results for M. Kawasaki

Imaging at high beam energies in the scanning electron microscope
- - L. Gignac
  - S.H. Boettcher
  - et al.
- 2006
- M&M 2006
Conference paper
Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope
- - L. Gignac
  - M. Kawasaki
  - et al.
- 2005
- Journal of Applied Physics
Paper