Publications

2 results for Alan C. West

Numerical simulation of electrochemical planarization of copper overburden
- - Alan C. West
  - Ingrid Shao
  - et al.
- 2005
- JES
Electrochemical planarization of interconnect metallization
- - Alan C. West
  - Hariklia Deligianni
  - et al.
- 2005
- IBM J. Res. Dev