Publications

2 results for Jing Sha

Incorporating process variation contours in design rule calculation and SRAM design optimization
- - Dongbing Shao
  - Jing Sha
  - et al.
- 2019
- SPIE Advanced Lithography 2019
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- - Chi-Chun Liu
  - Yann Mignot
  - et al.
- 2018
- SPIE Advanced Lithography 2018