Publications

2 results for Makoto Muramatsu

Electrical validation of the integration of 193i and DSA for sub-20nm metal cut patterning
- - Chi Chun Liu
  - Richard Farrell
  - et al.
- 2019
- MEMS/NEMS/MOEMS 2019
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- - Chi-Chun Liu
  - Yann Mignot
  - et al.
- 2018
- SPIE Advanced Lithography 2018