Publications

2 results for J.J. Park

Thin-film transformations and volatile products in the formation of nanoporous low- k polymethylsilsesquioxane-based dielectric
- - P. Lazzeri
  - L. Vanzetti
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- - P. Lazzeri
  - G.W. Rubloff
  - et al.
- 2004
- Surface and Interface Analysis
Paper