Publications

2 results for Parijat Bhatnagar

Controlling line-edge roughness and reactive ion etch lag in sub-150 nm features in borophosphosilicate glass
- - Parijat Bhatnagar
  - Siddhartha Panda
  - et al.
- 2007
- Journal of Applied Physics
Integrated non-SO ₂ underlayer and improved line-edge-roughness dielectric etch process using 193 nm bilayer resist
- - Parijat Bhatnagar
  - Siddhartha Panda
  - et al.
- 2006
- Applied Physics Letters