Publications

2 results for Chester Dziobkowski

Nitrogen implantation and diffusion in silicon
- - Lahir Shaik Adam
  - Mark E. Law
  - et al.
- 1999
- MRS Spring Meeting 1999
Effects of argon addition to a platinum dry etch process
- - K.R. Milkove
  - J. Coffin
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films