Publications

5 results for Bruno La Fontaine

Thorough characterization of a EUV mask
- - Hiroyuki Mizuno
  - Gregory McIntyre
  - et al.
- 2009
- Photomask and Next-Generation Lithography Mask Technology 2009
Exposure tool settings and OPC strategies for EUV Lithography at the 16nm node
- - Yunfei Deng
  - Jongwook Kye
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Flare evaluation of ASML alpha demo tool
- - Hiroyuki Mizuno
  - Gregory McIntyre
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Initial experience establishing a EUV baseline lithography process for manufacturability assessment
- - O.R. Wood II
  - D. Back
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Investigation of the current resolution limits of advanced extreme ultraviolet (EUV) resists
- - Patrick P. Naulleau
  - Clemens Rammeloo
  - et al.
- 2006
- SPIE Advanced Lithography 2006