Publications

2 results for Petra Fadi

Scanning excimer ablation system
- - Douglas S. Goodman
  - Thomas Ainsworth
  - et al.
- 1992
- LEOS 1992
Conference paper
Bench evaluation of lithographic lenses from measurements of the point spread function
- - Norman Bobroff
  - Petra Fadi
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper