Publications

2 results for V.K. Kamineni

Spectroscopic ellipsometry of porous low-κ dielectric thin films
- - V.K. Kamineni
  - C.M. Settens
  - et al.
- 2009
- FCMN 2009
X-ray scattering methods for porosity metrology of low-k thin films
- - C.M. Settens
  - V.K. Kamineni
  - et al.
- 2009
- FCMN 2009