Electro-chemical mechanical planarization and its evaluation on BEOL with 65nm node dimensions
- A. Sakamoto
- L. Economikos
- et al.
- 2005
- CMP-MIC 2005
Publications
Date
Featured collections
Popular topics
27 results for Laertis Economikos
Integrated electro-chemical mechanical planarization (Ecmp) for future generation device technology
- L. Economikos
- X. Wang
- et al.
- 2004
- IITC 2004
90 nm SiCOH technology in 300 mm manufacturing
- L. Clevenger
- M. Yoon
- et al.
- 2004
- ADMETA 2004
A 90nm dual damascene hybrid (organic / inorganic) low-k - Copper BEOL integration scheme
- T. Dalton
- A. Cowley
- et al.
- 2003
- ADMETA 2003
Structural demonstration of cost effective Isolation Trench fill for sub-110nm vertical trench DRAM and SOC applications
- S.-W. Yang
- W.-S. Liao
- et al.
- 2003
- VLSI-TSA 2003
Study of arsenic out-diffusion for buried plate formation in trench capacitors
- L. Economikos
- C.S. Murthy
- et al.
- 1998
- IEMT 1998
Applications of latent open test
- Laertis Economikos
- Shinwu Chiang
- et al.
- 1994
- MCMC 1994