Publications

2 results for S.P. Sant

Role of chamber dimension in fluorocarbon based deposition and etching of Si O2 and its effects on gas and surface-phase chemistry
- - E. Joseph
  - B.-S. Zhou
  - et al.
- 2008
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of pore morphology on the diffusive properties of a porous low- κ dielectric
- - E. Joseph
  - S.P. Sant
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures