Publications

2 results for Hyun-Ki Kim

Evaluation of barrier CMP slurries and characterization of ULK material properties shifts due to CMP
- - Wei-Tsu Tseng
  - Dimitri Kioussis
  - et al.
- 2008
- ECS Meeting 2008
Conference paper
Evaluation of Cu CMP barrier slurries for Ultra Low-k dielectric film (k~2.4) for 45nm technology
- - Feng Zhao
  - Laertis Economikos
  - et al.
- 2007
- ICPT 2007
Conference paper