Aluminum mobility and interfacial segregation in fully silicided gate contacts
- R.P. Pezzi
- M. Copel
- et al.
- 2005
- Applied Physics Letters
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13 results for R.P. Pezzi
High resolution profiling using ion scattering and resonant nuclear reactions
- R.P. Pezzi
- R.M. Wallace
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
Interfacial segregation of dopants in fully silicided metal-oxide- semiconductor gates
- M. Copel
- R.P. Pezzi
- et al.
- 2005
- Applied Physics Letters