A full-factory simulator as a daily decision-support tool for 300mm wafer fabrication productivity
- Sugato Bagchi
- Ching-Hua Chen-Ritzo
- et al.
- 2008
- WSC 2008
Conference paper
Publications
3 results for Sameer T. Shikalgar
Application of cluster tool modeling to a 300 mm fab simulation
- Sameer T. Shikalgar
- David Fronckowiak
- et al.
- 2003
- WSC 2003
Conference paper300 mm wafer fabrication line simulation model
- Sameer T. Shikalgar
- David Fronckowiak
- et al.
- 2002
- WSC 2002
Conference paper