Publications

2 results for Jordan Owens

Controlling linewidth roughness in step and flash imprint lithography
- - Gerard M. Schmid
  - Niyaz Khusnatdinov
  - et al.
- 2008
- EMLC 2008
Minimizing linewidth roughness in Step and Flash Imprint Lithography
- - Niyaz Khusnatdinov
  - Gerard M. Schmid
  - et al.
- 2008
- Microelectronic Engineering