Publications

5 results for Gerard M. Schmid

Controlling linewidth roughness in step and flash imprint lithography
- - Gerard M. Schmid
  - Niyaz Khusnatdinov
  - et al.
- 2008
- EMLC 2008
Minimizing linewidth roughness in Step and Flash Imprint Lithography
- - Niyaz Khusnatdinov
  - Gerard M. Schmid
  - et al.
- 2008
- Microelectronic Engineering
Mesoscale modeling for SFIL simulating polymerization kinetics and densification
- - Ryan L. Burns
  - Stephen C. Johnson
  - et al.
- 2004
- Microlithography 2004
Formation of deprotected fuzzy blobs in chemically amplified resists
- - Ronald L. Jones
  - Tengjiao Hu
  - et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
Diffusion induced line edge roughness
- - Michael D. Stewart
  - Gerard M. Schmid
  - et al.
- 2003
- Microlithography 2003